l Power supply equipped with phase sequence automatic phase change system
l High-precision thermocouple vacuum gauge, simple and practical
l Advanced design, complete functions, reasonable structure, simple and clear operation
l The control system of the device adopts the latest technology SF6 special valve
l The equipment adopts a mobile structure, convenient for on-site use, easy to move, and does not damage the ground
l Small overall size, light weight, low noise
1. The ultimate vacuum of the device is less than 10Pa
2. The annual leakage rate of the device is less than 1%
3. The pressure of the gas filling system is less than 0.8Mpa
Series Models
Type 4
Vacuum pump speed
4 liters/second (14.4m3/h)
Type 8
Vacuum pump speed
8 liters/second (28.8m3/h)
Type 15
���Vacuum pump speed
15 liters/second (54m3/h)
Type 30
Vacuum pump speed
30 liters/second (108m3/h)
Type 70
Vacuum pump speed
70 liters/second (252m3/h) Optional Roots pump unit
Type 150
Vacuum pump speed
150 liters/second (540m3/h) Optional Roots pump unit
Main configuration:
Vacuum pump: R5--0040 rotary vane vacuum pump (Germany)
Vacuum gauge: high-precision thermocouple vacuum gauge
Valve: stainless steel precision ball valve
Connecting pipe: 2 high-pressure pipes
